SAFER

Scanning electron microscope Analysis with Fib, Ebsd/Eds and Raman

About SAFER

One of only two systems in the UK, the SAFER (Scanning electron microscope Analysis with Fib, Ebsd/Eds and Raman) system in the School of Engineering offers a huge range of analysis options to probe materials in the micron/nanoscale domain.

Capabilities

The SAFER system has a wide variety of analytic capabilities, including a Field Emission Gun Scanning Electron Microscope, a focused ion Beam and a Raman Imaging Platform.

Confocal in chamber Raman Imaging Platform

WiTec RISE
Motorised 3-laser selection: 532 nm, 633 nm and 785 nm
Multiple motorised diffraction gratings
Vacuum Objective 100x NA=0.75; WD=4.0 mm, for applications from 360nm to NIR with excellent flatness of field
Point, line and Mapping capability
Full correlative analysis within the SEM, allowing overlays of SEM images and EDS and EBSD maps.
Advanced Spectral analysis and TrueMatch database allows quick identification of phases

$Electron Backscatter Diffraction (EBSD)$

Electron Backscatter Diffraction (EBSD)

Oxford Instruments Symmetry S3
Ability to carry out reflection or transmission (TKD) Kikuchi diffraction (TKD) analysis
High-speed pattern analysis in excess of 5700 pps, enables texture and grain size characterisation in a matter of seconds
Full 3d EBSD possible using FIB sectioning

Energy Dispersive X-ray Analyser (EDS)

Oxford Instruments Ultim Max 40
40 mm2 large area EDS detector
Point, line and mapping analysis modes as well as live imaging
Full 3d EDS possible using FIB sectioning

Field Emission Gun Scanning Electron Microscope

Field-free UHR-SEM BrightBeam of the TESCAN AMBER model
Ultra-high-resolution imaging and analytical performance over the widest range of materials
MultiVac provides both high vacuum and variable pressure options to 500Pa for optimal application flexibility.
In-chamber Everhart-Thornley SE detectors as well as in-column SE Multi-detector and axial detectors are supported by a retractable scintillator-type annular backscattered electron detector
Large analytical high-vacuum chamber with cradle stage and tilt

Focused Ion Beam (FIB)

TESCAN Orage model
Latest Ga-liquid metal ion source FIB
Resolution of 2.5 nm and a broad range of beam current choices
Multi-site FIB process automation

Staff

Dr Richard Wilbraham

Experimental Officer

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Professor Benjamin Robinson FHEA

Chair and Director of Materials Science Lancaster

Energy Lancaster, Molecular Scale Electronics, MSF Supervisors 2019/20, Quantum Nanotechnology, Quantum Technology Centre

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